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1S.A.A. Oloomi, 2A. Saboonchi and 2A. Sedaghat, Comparison Radiative Properties of Thin Semiconductor Films by Coherent and Incoherent Formulation, World Applied Sciences Journal 9 (4): 372-379, 2010.
1S.A.A. Oloomi, 2A. Saboonchi and 2A. Sedaghat, Comparison Radiative Properties of Thin Semiconductor Films by Coherent and Incoherent Formulation, World Applied Sciences Journal 9 (4): 372-379, 2010.
Comparison Radiative Properties of Thin Semiconductor Films by Coherent and Incoherent Formulation
1S.A.A. Oloomi, 2A. Saboonchi and 2A. Sedaghat
1Department of Material Engineering, Islamic Azad University, Yazd Branch, Yazd, Iran
2Department of Mechanical Engineering, Isfahan University of Technology, Isfahan, I.R. of Iran
Abstract:
Accurate radiometric temperature measurements of silicon wafers and heat transfer analysis of rapid
thermal processing furnaces require a thorough understanding of the radiative properties of the silicon wafer,
whose surface may be coated with dielectric or absorbing films. This Paper, predict the directional, spectral and
temperature dependence of the radiative properties for the multilayer structures consisting of silicon and related
materials such as silicon dioxide and silicon nitride. Results showed that for visible wavelengths, the reflectance
decreases 60% as the coating thickness increases from 200 nm to 800 nm and the emittance increases 20% as
the coating thickness increases from 200 nm to 800 nm. In these wavelengths, transmittance is negligible. In near
infrared wavelengths, silicon nitride coating has higher average reflectance than silicon oxide coating and
silicon dioxide coating has higher average emittance than silicon nitride coating. In visible wavelengths the
reflectance increases as the temperature increases, because of decreasing emittance. Results showed that as
the film thickness increases, the free spectral range decreases, resulting in more oscillations with thicker silicon
dioxide film. But interferences in the substrate are generally not observable in incoherent formulation.
Key words:Emittance % Reflectance % Transmittance % Incoherent Formulation % Coherent Formulation
% Semiconductor % Multilayer
Journal Papers
Month/Season:
February
Year:
2010
